Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Adjustment of pre-assembled systems with the Nd:YAG-Laser using actuators

Datum: 06.04.2001



  • Prof. Dr.-Ing. M. Geiger
  • Prof. Dr.-Ing. K. Feldmann, Universität Erlangen

There are only few micro-technology processes for the highly accurate adjusting of positionsensitive components. In this field, laser adjustment is an innovative process for the highly accurate, non-contact alignment of any pre-assembled system. This work compiled the fundamentals of laser adjustment using actuators that are irradiated with a Nd:YAG-laser. First, the essentials of irradiating basic actuator geometries were examined systematically. Besides experiments, thermo-mechanical calculations based on the Finite Element Method were conducted and analytical models in order to deepen the understanding of the process were developed. In order to improve the thermally induced stress condition to increase the lifetime stability, the local laser stress relieving method was introduced, following the flame stress relieving idea. A control-loop for using laser adjustment in serial production was set up and an actuator-independent calculation module was developed. This module draws on the behavior of the used actuator to determine the necessary laser parameters and irra-diation positions to achieve a given accuracy with a minimum number of irradiations and measurements. This allows to implement an automated laser adjustment process. The knowledge gained in this work can be utilized in all fields of micro-technology where components have to be adjusted with a high accuracy in serial production.