Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Laser adjustment with excimer laser - process parameters and models for the construction of actuators

Datum: 28.02.2001



  • Prof. Dr.-Ing. M. Geiger
  • o. Univ. Prof. Dr. techn. D. Schuöcker, TU Wien

Laser adjustment with excimer lasers is an industrially hardly used process. The reason for this was not only the risk of a new process chain which can be characterised by a low cost and rough assembly step in combination with a laser adjustment process. The main lack was the scientifically not comprehensively described effect of the laser adjustment next to the absence of models for the virtual engineering which is getting more and more important in these days. The method of calculating the local maximum temperature sets the basis of the analytical model, describing the effect of all significant parameters and the mechanism of the process. Taking more complex geometries or the transient behaviour of the process into account, the complex correlation of plastic relaxation and counter-bending of this dynamic process was calculated by FEM. The pulsenergy and the beam dimensions were found out as main variable control parameters. The pulselength, pulseform and multiple irradiations enlarge the process window with different efficiency, but cannot be used as control parameter due to their small effect on the bending angle. The calculation of the essential operation time of the closed loop system enables the estimation of the production costs.