Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Excimer laser beam bending of thin metallic foils using a homgeneous beam profile



Datum: 15.04.2003


Author


Reporter

  • Prof. Dr.-Ing. Dr.-Ing. E.h. mult. Dr.h.c. M. Geiger
  • Prof. Dr.-Ing. K. Feldmann

Thanks to laser technology, forming using thermally induced tensions has found entrance into micro technology, initially starting from flame straightening in shipbuilding. To realize bendings the Temperature-Gradient-Mechanism can be used. Therefor the compressive stresses induced need to be limited to surface-near areas of the work piece. Thus, the excimer laser allows the bending of thin metallic foils without the use of any exterior forces. When using relatively high fluencies melting and even ablation may occur at the surface irradiated. Thus raising the laser fluency does not necessarily lead to larger bending angles. The work illustrates excimer laser beam bending using a homogeneous light line, discusses various analytical models and describes appearing phenomena, when irradiating at fluences above ablation threshold, within a newly developed descriptive model. The knowledge basis provided within this work together with the analytical models provide good appliances for the process design of excimer laser beam bending.