Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Basic investigations of excimer laser ablation under liquid films

Datum: 01.07.2008



  • Prof. Dr.-Ing. Dr.-Ing. E.h. mult. Dr. h.c. mult. M. Geiger
  • Prof. Dipl.-INg. Dr. techn. D. Schuöcker (TU Wien)

In the context of the work a solution is examined on basis of a liquid film, in order to avoid material deposits during ablation of ceramics and metals using excimer laser radiation. This solution should be reliably and at small technical effort. The investigations show that by using a thin liquid layer on the irradiated surface the disposal of debris can completely be avoided. The energy transferred to the liquid by means of thermal conduction leads to the formation of local steam bubbles, which collapse after the laser pulse has ended. During their developing phase and the following collapsing of the steam bubbles pressure waves arise and displace the melt within the irradiated surface and move away the particles from the surface.