Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Laser beam induced pyrolysis of preceramic polymers

Datum: 14.11.2006



  • Prof. Dr.-Ing. Dr.-Ing. E.h. mult. Dr.h.c. M. Geiger
  • Prof. Dr.-Ing. G. Ziegler

The application of functional ceramic coatings on complexly shaped surfaces or the generation of selective surface structures are often problematic when conventional coating techniques are applied. Laser pyrolysis of polymeric precursor layers could help to solve this problem. Due to the insufficient knowledge about the detailed mechanism of laser induced pyrolysis it is not yet a standard technique for generating functional coatings and structures. At present laser pyrolysis is commercially used only for the production of fine ceramic powders. The powders are normally generated by a CO2 laser. Research about the fundamental mechanisms of laserprecursor interaction especially with Nd:YAG lasers is rare. Thus, the aim of this research work is to develop a better understanding of the laser pyrolysis process. The applied precursor coatings are therefore pyrolysed by CO2 and Nd:YAG lasers. The different influence factors to the morphology and the chemical structure and composition of the generated ceramic layers are analysed by different methods. In view of future technical applications (e. g. high temperature sensors) electrically conductive ceramic lines are created. Their behaviour under rapid temperature changes is investigated.