Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg



Use of monocrystalline silicon as tool material for cutting thin metallic foils



Project Status: finished

Members


The objective of this collaborative project with the University of Applied Science in Furtwangen is the qualification of monocrystalline silicon as a tool material for cutting thin metal foils. For this purpose the precision of well-established manufacturing techniques in microsystems technology is used for the miniaturisation of cutting tools. Aiming at an application for blanking operations especially the brittle material properties of silicon are a limiting factor. On the basis of microcutting experiments in a special test rig and FE simulations a fundamental process knowledge has been created. By means of selective positioning errors as well as different surface properties of the punches due to different manucturing methods, the sensitivity of the silicon punches against process errors was evaluated based on the tool wear and the punch load distribution during the blanking process. The acquired knowledge will be used in the further course of the project for the entire manufacturing of a complete tool system for blanking by microsystems technologies.

Tool system with a silicon punch (a) and possible positioning errors for the cutting process (b)


Research Groups


Publications

    2016

    • Hildering, S.; Michalski, M.; Engel, U.; Merklein, M.:
      Tool Load Sensitivity against Multidimensional Process Influences in Microblanking of Thin Metal Foils with Silicon Punches.
      J. Manuf. Sci. Eng. 138(2016)9, pp. 091004 1-9

    2015

    • Hildering, S.; Engel, U.; Merklein, M.:
      Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils with Silicon Punches.
      J. Micro Nano-Manuf. 3(2015)2, pp. 021001

    • Hildering, S.; Engel, U.; Merklein, M.:
      Improved Tool Performance in Microblanking of Thin Metal Foils Through Defined Cutting Edge Modification of Silicon Punches.
      In: Annoni, M.; Fassi, I.; Wiens, G.J.; Dimov, S. (Edtrs.): Proc. 4M/ICOMM2015 Conf., Research Publ., 2015, pp. 238-241

    • Hildering, S.; Michalski, M.; Engel, U.; Merklein, M.:
      Tool Load Sensitivity against Multidimensional Process Influences in Microblanking of Thin Metal Foils with Silicon Punches.
      In: ASME (Edtr.): Proceedings of the ASME 2015 International Manufacturing Science and Engineering Conference, 2015, pp. 1-10

    2014

    • Hildering, S.; Engel, U.; Merklein, M.:
      Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils with Silicon Punches.
      Proc. 9th Int. Conf. Micromanufacturing (2014), published on CD

    • Hildering, S.; Merklein, M.; Engel, U.:
      Performance of Silicon Punches for Microblanking of Thin Metal Foils.
      Proc. 4th Int. Conf. Nanomanufacturing nanoMan (2014), published on CD

    2013

    • Hildering, S.; Engel, U.; Merklein, M.:
      Influence of the Cutting Edge Geometry on the Tool Stress Distribution in Monocrystalline Silicon Punches for Microblanking of Thin Metal Foils.
      In: Azcárate, S.; Dimov, S. (Edtrs.): Proc. 10th Int. Conf. Multi-Material Micro Manufacture, Research Publ., 2013, pp. 85-88

    2012

    • Hildering, S.; Becsi, L.; Engel, U.; Merklein, M.; Mescheder, U.:
      Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches.
      In: Shore, P.; Spaan, H.; Burke, T. (Edtrs.): Proc. 12th Int. Conf. European Society for Precision Engineering and Nanotechnology, euspen, 2012, pp. 177-180

    • Hildering, S.; Becsi, L.; Merklein, M.; Mescheder, U.:
      Tranciatura ad alta precisione di fogli di rame mediante punzoni in silicio monocristallino rivestiti e non.
      Lamiera (2012)2, pp. 44-48

    2011

    • Hildering, S.; Engel, U.; Merklein, M.:
      Use of Monocrystalline Silicon as Tool Material for Highly Accurate Blanking of Thin Metal Foils.
      AIP Conf. Proc. 1353(2011), pp. 481-486

    • Hildering, S.; Becsi, L.; Engel, U.; Merklein, M.; Mescheder, U.:
      High-precision blanking of thin copper foils using uncoated and coated monocrystalline silicon punches.
      In: Kück, H.; Reinecke, H.; Dimov, S. (Edtrs.): Proc. 8th Int. Conf. Multi-Material Micro Manufacture, Research Publ., 2011, pp. 191-195

    • Becsi, L.; Hildering, S.; Mescheder, U.; Engel, U.:
      Mikrostanzen - Einsatz von einkristallinem Silizium als Werkzeugwerkstoff für Schneidprozesse von dünnen Folien.
      In: BMBF ; VDE ; GMM ; VDI/VDE-IT (Edtrs.): Tagungsband 4. Mikrosystemtechnik-Kongress Darmstadt, VDE GmbH, 2011, pp. 531-534

    2010

    • Hildering, S.; Engel, U.:
      A novel approach for high-precision blanking of thin metal foils using monocrystalline silicon as tool material.
      In: Fillon, B.; Khan-Malek, C.; Dimov, S. (Edtrs.): Proc. 7th Int. Conf. Multi-Material Micro Manufacture, Research Publ., 2010, pp. 216-219

    Letztes Update: 03.09.2015