Lehrstuhl für Fertigungstechnologie, Universität Erlangen-Nürnberg

Accurate manipulation using laser technology

Project Status: finished


Miniaturization in the industrial production of electrical, optical and micro-mechanical components demands improved adjustment techniques. The aim of this Brite-Euram III project was to develop a fast and flexible industrial process for sub-micron accuracy adjustment of micro-parts using laser radiation. As a result, certain geometries in combination with adapted laser parameters allow the adjustment of electrical, optical and magnetic components. Next to the development of the simulation tool for the calculation of the thermal and mechanical behaviour a closed loop system was set up. This flexible closed loop system calculates the laser parameters necessary for the adjustment based on experimental results. The so calculated parameters are automatically transferred to the laser system, which applies the laser pulses on the actuator. The feedback signal from the metrology is used for further calculations to reduce the influence of disturbances and therefore to increase the final accuracy.

Letztes Update: 30.04.2010